Te Tūranga Huri Tika o te Paura Iti Alumina Parauri i roto i te Ahumahi Ārahi-Haumaru
E hoa mā, i tēnei rā ka kōrero tātou mō tētahi mea pakari, ā, he mea noa iho hoki—paura moroiti alumina parauri kua hanumiKāore pea koe i rongo mō tēnei mea, engari ko ngā maramara tino hirahira, tino ngāwari hoki o tō waea me tō mataarataki atamai, i mua i te hanganga, kua oti kē te mahi i tēnei mea. Ehara i te whakanui te kī ko ia te "kaiwhakapaipai matua" o te maramara.
Kaua e whakaaro he taputapu taratara pērā i te kōhatu whakakoi. I roto i te ao o ngā mea hanga-ā-ira, he rite tōna mahi ki te mahi a te kaiwhakairo moroiti e whakamahi ana i ngā maripi koi nano.
I. Te "Whakairo Kanohi" o te Maramara: He aha i Hiahiatia ai te Huri?
Kia mārama tātou ki tētahi mea tuatahi: kāore ngā maramara e tupu tika ana i runga i te whenua papatahi. Ka "hangaia" papatahi i te papatahi ki runga i tētahi paparanga silicon tino parakore, papatahi (e kiia nei e tātou he "paparanga"), pērā i te hanga whare. He maha ngā papa o tēnei "whare", ā, he angiangi ake te ara iahiko i ia papa i te kotahi mano o te matotoru o te makawe tangata.
Nā, koinei te raruraru: i a koe e hanga ana i tētahi papa hou, ki te mea he paku koretake te turanga—te mata o te papa o mua—ahakoa he iti noa te pūnga o te ngota, ka taea e ia te piko o te whare katoa, te poto o te ara iahiko, ā, ka kore e taea te whakamahi i ngā maramara. Ehara i te mea whakakatakata ngā ngaronga.
Nō reira, i muri i te otinga o ia papa, me whakahaere he "horoi" me te "whakataurite" tino pai. He ingoa ataahua tō tēnei tukanga: "Chemical Mechanical Planarization," he whakarāpopototanga ko CMP. Ahakoa te ahua uaua o te ingoa, ehara i te mea uaua ki te mārama ki te kaupapa: he huinga o te waikura matū me te pakū ā-ringa.
Ka whakamahia e te "pū" matū he wai whakakanapa motuhake hei whakangawari, hei waikura hoki i te rauemi e tangohia ana, kia "ngawari" ake ai.
Ka whai wāhi mai te "pā" ā-ringa—paura moroiti kōrunuma parauriKo tāna mahi he whakamahi i ngā tikanga ā-tinana hei "waru" tika, hei "taurite" hoki i te rauemi kua "whakangawaritia" e te tukanga matū.
Tērā pea koe e pātai, he aha ai tēnei mea motuhake, nā te tini o ngā mea whakakoi e wātea ana? Koinei te wāhi e puta mai ai ōna āhuatanga tino pai.
II. "Paura Maikoroni Kāore i te Tino Maikoroni": Te Pūkenga Ahurei o te Alumina Parauri Kua Whakakīia
I roto i te umanga haurua-ira, ehara te paura parauri kua whakakikoruatia ki te alumina i te hua noa. He wae "ope motuhake" tēnei, kua tino whiriwhiria, kua whakatikatikaina hoki.
Tuatahi, he uaua, engari ehara i te mea whakarihariha.Alumini parauri kua hanumiKo te pakeke o te 's he tuarua noa iho i te taimana, he nui atu i te nui hei whakahaere i ngā rauemi maramara e whakamahia whānuitia ana pērā i te silicon, te silicon dioxide, me te tungsten. Engari ko te mea nui ko tōna pakeke he pakeke "uaua". Kāore i rite ki ētahi rauemi pakeke ake (pērā i te taimana) he pakarukaru, he ngāwari hoki te pakaru i raro i te pēhanga, ka mau tonu te āhua o te alumina parauri kua whakaranua, me te whakarite i te kaha tapahi, me te karo i te noho hei "huānga whakangaro."
Tuarua, ko tōna rahi whāiti o te matūriki ka whakarite kia ōrite te tapahi. Koinei te mea tino nui. Whakaarohia te ngana ki te whakakanapa i tētahi jade utu nui ki tētahi puranga kōhatu o ngā rahi rerekē. Ka waiho e ngā kōhatu nunui he poka hohonu, ko ngā mea iti pea he iti rawa hei mahi. I roto i ngā tukanga CMP (Chemical Mechanical Polishing), kāore rawa tēnei e whakaaetia. Me tino whāiti te tohatoha rahi matūriki o te paura iti alumina parauri e whakamahia ana i roto i ngā semiconductors. Ko te tikanga o tēnei he tata rite te rahi o ngā matūriki katoa. Mā tēnei ka whakarite kia neke ngātahi ngā mano tini o ngā matūriki paura iti i runga i te mata o te wafer, ka pēhia kia ōrite hei hanga i tētahi mata parakore, kaua i te mata pokapoka. Kei te taumata nanometer tēnei tika.
Tuatoru, he mea "pono" te matū. He whānuitanga o ngā matū e whakamahia ana e te hanga maramara, tae atu ki ngā taiao waikawa me te kawakore. He tino pumau te matū o te paura moroiti alumina parauri, ā, kāore e ngāwari te tauhohe ki ētahi atu wāhanga o te wai whakakanapa, e ārai ana i te whakaurunga mai o ngā paru hou. He rite ki tētahi kaimahi uaua, ngāwari te whakahihi—te momo tangata e arohaina ana e ngā rangatira (ngā miihini).
Tuawhā, ka taea te whakahaere i tōna āhua, ka puta he matūriki "maeneene". Ka taea e te paura moroiti alumina parauri matatau te whakahaere i te "āhua" (te "āhua" rānei) o ngā matūriki. Mā te tukanga motuhake, ka taea te huri i ngā matūriki he koi ngā taha ki ngā āhua tata-porowhita, porowhita-maha rānei. Ka whakaitihia e ēnei matūriki "maeneene" te pānga "whakakorikori" ki te mata o te papa i te wā e tapahi ana, ka tino whakaitihia te tūponotanga o ngā karawarawa.
III. Te Whakamahinga o te Ao Tūturu: Te "Reihi Wahangu" i runga i te Raina Whakaputa CMP
I te raina whakaputa CMP, ka puritia ngā papa wafer ki te wāhi tika mā roto i ngā pūwero korehau, ka pēhia te mata ki raro, ka pēhia ki runga i tētahi papa whakakanapa hurihuri. Ka rehuhia tonutia te wai whakakanapa kei roto ko te paura iti alumina parauri kua hanumi, pērā i te kohu angiangi, i waenganui i te papa whakakanapa me te papa wafer.
I tēnei wā, ka tīmata te "whakataetae tika" i roto i te ao moroiti. E miriona ngā matūriki paura moroiti parauri kua whakaranua, i raro i te pēhanga me te hurihuri, ka mahi i ngā miriona tapahi taumata-nanomita ia hekona i runga i te mata o te papa. Me neke ngātahi rātou, pērā i te ope taua whai mana, me te neke haere maeneene, me te "whakapapatahi" i ngā wāhi teitei, me te "waiho kau" i ngā wāhi iti.
Me ngawari te tukanga katoa, pērā i te hau o te kōanga, kaua i te tupuhi e mura ana. Ka taea e te kaha nui te rakuraku, te hanga rānei i ngā kapiti moroiti (e kiia nei ko te "kino o raro i te mata"); ka iti te kaha ka hua ake he iti te whai huatanga, ā, ka whakararuraru i ngā wā whakaputa. Nō reira, ko te whakahaere tika i te kukū, te rahi o te matūriki, me te āhua o te paura moroiti alumina parauri kua hanumi ka whakatau tika i te hua me te mahi o te maramara whakamutunga.
Mai i te whakakanapa tuatahi o ngā papa silicon, ki te whakapūmau i ia paparanga ārai (te hauhā silicon), ā, i te mutunga ki te whakakanapa i ngā mono tungsten me ngā waea parahi e whakamahia ana mō te hono i ngā ara iahiko, he mea nui te paura iti alumina parauri kua whakakotahihia i roto i te nuinga o ngā taahiraa whakapūmau nui. Ka horapa puta noa i te tukanga hanga maramara katoa, he "toa i muri i ngā whakaaturanga" pono.
IV. Ngā Wero me te Ao o Muri Mai: Kāore he mea pai rawa atu, engari he mea pai ake
Ae, kāore he mutunga o tēnei ara. I te mea kei te ahu whakamua ngā tukanga hanga maramara mai i te 7nm me te 5nm ki te 3nm me ngā rahi iti ake, kua eke ngā whakaritenga mō ngā tukanga CMP ki te taumata "tino nui". He nui ake ngā wero mō te paura moroiti alumina parauri kua whakakotahihia:
He pai ake, he ōrite ake:Ngā paura iti o te heke maime eke pea ki te tauine tekau nanometer, me te tohatoha rahi matūriki kia ōrite me te mea e tātarihia ana e te laser.
Kaihoroi: He mate te hunga poke i te katote whakarewa, ā, ka piki haere te hiahia mō te parakore.
Te Mahi: Ka puta ake rānei ngā "paura moroiti atamai" ā muri ake nei? Hei tauira, mā ngā mata kua whakarerekētia motuhaketia, ka taea e rātou te whakarerekē i ngā āhuatanga tapahi i raro i ngā āhuatanga motuhake, te whakatutuki rānei i te whakakoi-ake, te whakahinuhinu-ake, me ētahi atu mahi?
Nō reira, ahakoa tōna takenga mai i te umanga whakakoi tuku iho, kua tino rerekē te paura iti alumina parauri kua whakaranua i tōna urunga ki te ao hou o ngā semiconductors. Ehara i te mea he "hama" i ēnei rā, engari he "soclep nanosurgical". Ko te mata maeneene o te maramara matua o ia taputapu hiko matatau e whakamahia ana e tātou nā te maha o ngā matūriki ririki.
He kaupapa nui tēnei e whakahaerehia ana i roto i te ao moroiti, āpaura moroiti alumina parauri kua hanumihe tohunga tino puku engari he mea nui hoki i roto i tēnei kaupapa.