Te Uara Ahurei o te Paura Matotoru Silicon Carbide Kakariki i roto i te Ahumahi Semiconductor
He ingoa rongonui te umanga haurua-ira mō te hangarau matatau, ā, he maha ngā tāngata e kōrero ana mō ngā kaupapa papai pēnei i ngā mīhini whakaahua-ira me te hoahoa maramara. Heoi, i roto i tēnei umanga, he mea nui te mahi a ētahi rauemi iti noa iho.Paura moroiti karawiti silicon matomatohe rauemi pēnei. I tēnei rā, me matapaki tātou i tēnei rauemi motuhake, e mahi puku ana i roto i te hanga haurua-ira.
Kia tīmata ahau me tētahi kōrero whakamere. I tērā tau, i tae atu ahau ki tētahi whakaaturanga hokohoko a te umanga haurua-ira. I tētahi tūru iti noa iho, he maha ngā miihini e kōrero ana mō tētahi taputapu huri. I a au e whakarongo tata ana, ka rongo ahau i a rātou e kōrero ana mō te "paura moroiti karāhe silicon matomato." I pōhēhē ahau i taua wā; he rite ki tētahi mea whakakoi ahumahi tuku iho, nō reira me pēhea te hono atu ki ngā haurua-ira tino tika? Nō muri mai, ka mōhio ahau i roto i tēnei umanga, ko te mea taketake ake o te rauemi, ko te mea nui ake.
He aha rawa te paura iti o te silicon carbide matomato? He mea hanga noa iho, he mea tino mārō, he mea whakarewa i roto i te oumu hiko pāmahana teitei mai i ngā rauemi mata pērā i te onepu quartz me te petroleum coke. I tapaina tēnei mea nā tōna parakore teitei me tōna tae matomato motuhake. Kaua e whakaititia ēnei matūriki ririki; ko tō rātou mārō te tuarua o te taimana, engari he pai ake te pumau o te wera me te kore e taea te whakamahi matū.
I roto i te hangahanga haurua-ā-ira, ko te papatahi o te wafer te mea e whakatau tika ana i te hua o te maramara. Mā tēnei ka tae mai tātou ki te pūkenga matua okāpira silicon matomatopaura iti: te whakakanapa matū ā-ringa (CMP). E whakamahi ana a Lao Zhang, he miihini tukanga i tētahi whare hanga wafer, i tētahi kupu whakarite oraora: "He rite ki te hoatu i tētahi 'maimoatanga kanohi' ki tētahi wafer—te whakangawari i ngā puku me ngā mea kāore i te ōrite, me te kore e waiho he karawarawa. Ko te paura iti silicon carbide matomato he rite ki ngā matūriki moroiti tioata i roto i ngā mahi tiaki kiri tino pai—he ngawari engari he whai hua." Inaa, i roto i te hanga maramara, ahakoa he torutoru noa iho ngā hauwhā o te maikoroni o te kore ōrite ka taea te whakaputa i tētahi ara iahiko poto, tuwhera rānei.
He wero tonu te whakahaere wera i roto i te umanga haurua-waea. I te piki haere o te whakaurunga maramara, ka nui haere te horapa o te wera.Paura moroiti karawiti silicon matomatoHe pūkenga ahurei tōna i tēnei āhuatanga: mā te tāpiri atu ki ngā rauemi kawe wera ka pai ake te marara o te wera. I kī mai tētahi miihini wera i tētahi kamupene maramara rongonui ki ahau, "Kei te whakamahi mātou i tētahi paura moroiti karāhe kakariki motuhake i roto i tā mātou whakapiri wera kounga teitei, e whakapai ake ana i te pai o te marara o te wera mā te neke atu i te 20%. He mea whakaora ora tēnei i roto i ngā hangarau tukanga 5nm me te 3nm."
He mea nui rawa atu te paura iti karāhe silicon kakariki i roto i te hanga taputapu haurua-ira. He maha ngā wāhanga matua o ngā mīhini whakairo me ngā mīhini whakairo, e utu ana i ngā tekau miriona yuan, e hiahia ana kia tino tika te mahi miihini. Hei tauira, ko ngā pūnaha whatu o ngā mīhini whakairo e hiahia ana kia tino papatahi te whakaata, e hiahiatia ana te whakamahi i te paura iti karāhe silicon kakariki mōte huri tikaI mea tētahi hōia tawhito, e 20 tau te roa o tana wheako, "He tino uaua te whakamahi i tēnei rauemi. Me tino whakahaere te rahi o te matūriki, te kukū, me te uara pH; ahakoa he iti noa te rerekētanga ka pā ki te hua whakamutunga."
He mea tika kia mōhiotia, nā te pikinga ake o ngā rauemi haurua-ā-roto o te whakatupuranga tuatoru, kua kitea he whakamahinga hou o te paura iti o te silicon carbide matomato. Ko ngā taputapu haurua-ā-roto e hangai ana ki te silicon carbide me whakamahi i te paura iti o te silicon carbide matomato hei huri me te whakakanapa i te wā e tukatuka ana. He huringa whakamere tēnei—te whakamahi i te silicon carbide hei tukatuka i te silicon carbide. I menemene te kaiwhakahaere hangarau o tētahi kamupene rauemi hou o te haurua-ā-roto, ā, i mea ia, "He rite ki te whakamahi i te taimana hei tapahi i te taimana; ko ngā rauemi rite anake ka tino mārama tetahi ki tetahi."
He mahi motuhake anō tā te paura iti karāhe silicon carbide matomato ki te whakahaere kounga. Me tiaki tonu ngā taputapu i ngā wheketere hiko hiko, inā koa te horoi i ngā raina kawe me ngā rūma tauhohenga. Nā te mea he koretake te matū o te paura iti karāhe silicon carbide matomato, ā, kāore e whakauru mai i ngā poke hou, koinei te rauemi pai mō ngā tukanga horoi. I whakakitea e tētahi miihini tiaki, "Ki te whakatauritea ki ētahi atu mea whakakoi,paura moroiti karawiti silicon matomatokāore e waiho ana i ngā katote whakarewa ki ngā pakitara o roto o ngā taputapu, he mea nui tēnei mō te pupuri i tētahi taiao ma i roto i te hanga maramara.”
He pono, he wāhi kei ia rauemi hei whakapai ake. Ko ngā wero o nāianei e pā ana ki te paura iti silicon carbide matomato kei roto i te whakahaere utu me te pumau o te kounga. Ko te tukanga whakaputa uaua me te nui o te whakapaunga pūngao e whai wāhi ana ki te utu nui. Hei tāpiri, ko te pumau puta noa i ngā puranga he āwangawanga matua mō ngā kaiwhakamahi. Heoi, he maha ngā kamupene ā-rohe matua kei te aro atu ki ēnei take, me te whakawhāiti haere i te rerekētanga me ngā hua kawemai mā te whakapai ake i ngā tukanga whakaputa me ngā pūnaha whakahaere kounga.
I te tirohanga whakamua, i te whanaketanga o te hangarau haurua-ira ki ngā tukanga iti ake me ngā taumata whakaurunga teitei ake, ka piki haere tonu te hiahia mō te paura iti karāhe silicon matomato. He pono rawa tēnei i roto i ngā mara hou pēnei i ngā maramara matauranga horihori, ngā maramara whakawhitiwhiti 5G, me ngā maramara taraiwa motuhake, e nui ake ana ngā tono mō te tika o te tukatuka me te mahi whakamarara wera. Ka huaki ake tēnei i te whānuitanga o ngā tono mō te paura iti karāhe silicon matomato.
E maumahara ana ahau ki tētahi tohunga o te umanga i kī ai, "He rite te umanga haurua-ira ki tētahi maunga hukapapa. Ko te mea e kitea ana e te tangata ko te hoahoa maramara me te hanga nui i runga ake i te mata, ko ngā rauemi, ngā tukanga, me ngā taputapu i raro i te mata ko te turanga e tautoko ana i te umanga katoa." Ko te paura moroiti silicon carbide matomato he wāhanga nui o ēnei rauemi turanga. Ahakoa kāore i te tino ātaahua pērā i te mīhini lithography, ko ēnei rauemi "kāore e kitea" e tautoko ana i te whanaketanga o te umanga haurua-ira katoa.
A te wā e whai ake nei ka whakamahi koe i te waea atamai, ka taraiwa rānei i tētahi motuka atamai, whakaarohia pea kei muri i ēnei hua hangarau teitei te takoha a ngā rauemi "māmā" pērā i te paura iti karāhe silicon matomato. Heoi anō, ko te ahunga whakamua o ia ahumahi e kore e taea te wehe atu i ēnei "toa" puku, whakatapua i muri i ngā whakaaturanga.